Kinetic Monte Carlo for Process Simulation: First Principles Calibrated Parameters for BO 2

Autor: Anne Hémeryck, Nicolas Salles, Layla Martin-Samos, Sylvain Joblot, Antoine Jay, Pierre-Louis Julliard, Thomas Cabout, Fuccio Cristiano, Frederic Monsieur, Denis Rideau, Nicolas Guitard, Miha Gunde

Publikováno v: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2021, Dallas, United States. ⟨10.1109/SISPAD54002.2021.9592580⟩
2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2021, Dallas, United States. pp.219-223, ⟨10.1109/SISPAD54002.2021.9592580⟩
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2021, Dallas, United States. pp.219-223, ⟨10.1109/SISPAD54002.2021.9592580⟩

International audience; The diffusion path, formation energies and possible charge states of O i , O 2i and BO 2 complex are determined using ab initio calculations. We propose an ab initio based calibration for Kinetic Monte Carlo model with the aim

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::45228f73c6e2fcd96d8186290f1d55eb
https://hal.laas.fr/hal-03366600