Zobrazeno 1 - 10
of 57
pro vyhledávání: '"Piel, Jean Philippe"'
Autor:
Stehle, Jean-Louis, Samartzis, Peter C., Stamataki, Katerina, Piel, Jean-Philippe, Katsoprinakis, George E., Papadakis, Vassilis, Schimowski, Xavier, Rakitzis, T. Peter, Loppinet, Benoit
Publikováno v:
In Thin Solid Films 31 March 2014 555:143-147
Publikováno v:
In Applied Surface Science 2009 256(3) Supplement:S72-S76
Autor:
Gilliot, Mickael, Piel, Jean-Philippe
Publikováno v:
In Thin Solid Films 2008 516(22):7996-8001
Autor:
Vienne, Guillaume, MILORD, Laurent, Piel, Jean-Philippe, Iff, Wolfgang, Coste, Philippe, Sippel, Astrid, Combier, Tristan, Tarnowka, Alexandre, Boulanger, Jean-François, Reymond, Georges-Olivier, Alliata, Dario, BOSSEBOEUF, Alain
Publikováno v:
European Optical Society Biennal Meeting (EOSAM)
European Optical Society Biennal Meeting (EOSAM), Oct 2018, Delft, Netherlands
European Optical Society Biennal Meeting (EOSAM), Oct 2018, Delft, Netherlands
International audience; We use three metrology techniques, vertical scanning interferometry (VSI), confocal chromatic microscopy (CCM), and time domain optical coherence tomography (TD-OCT), for depth measurement of through-silicon vias (TSVs) of var
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::10d6e7e400faac25b4e3641f10ef6554
https://hal.archives-ouvertes.fr/hal-02343393
https://hal.archives-ouvertes.fr/hal-02343393
Publikováno v:
In Journal of Non-Crystalline Solids May 2002 303(1):167-174
Autor:
Fresquet, Gilles, Piel, Jean-Philippe, Perrot, Sylvain, Takizawa, Hideo, Sato, Osamu, Gu, Allen, Feser, Michael, Johnson, Bruce, Estrada, Raleigh, Tatsumoto, Yoshitaka
Publikováno v:
Three-Dimensional Integration of Semiconductors; 2015, p167-200, 34p
Publikováno v:
SPIE's 1996 International Symposium on Microlithography
SPIE's 1996 International Symposium on Microlithography, Mar 1996, Santa Clara, United States. pp.608-620, ⟨10.1117/12.240988⟩
SPIE's 1996 International Symposium on Microlithography, Mar 1996, Santa Clara, United States. pp.608-620, ⟨10.1117/12.240988⟩
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::2fc912cb2176945c737e9ef913866ec6
https://hal.archives-ouvertes.fr/hal-02540731
https://hal.archives-ouvertes.fr/hal-02540731
Autor:
Stehlé, Jean-Louis, Piel, Jean-Philippe, Campillo, Jose, Zahorski, Dorian, Giovannini, Hugues
Publikováno v:
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61522Z-61522Z-7, 7p
Publikováno v:
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61544G-61544G-7, 7p
Publikováno v:
Proceedings of SPIE; Nov2006, Issue 1, p615233-615233-8, 8p