Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Pici, Anita"'
Publikováno v:
Proceedings of SPIE; 1/11/2018, Vol. 10583, p1-8, 8p
Autor:
Goldberg, Kenneth A., Felix, Nelson M., Lim, Mijung, Lim, Chang-Moon, Ahn, Chang-Nam, Park, Daniel, Fumar-Pici, Anita, Seong, Nak
Publikováno v:
Proceedings of SPIE; March 2018, Vol. 10583 Issue: 1 p105830X-105830X-8, 952479p
Autor:
Panning, Eric M., Goldberg, Kenneth A., Lyons, Adam, Rio, David, Lee, Sook, Wallow, Thomas, Delorme, Maxence, Fumar-Pici, Anita, Kocsis, Michael, de Schepper, Peter, Greer, Michael, Stowers, Jason K., Gillijns, Werner, De Simone, Danilo, Bekaert, Joost
Publikováno v:
Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p101431E-101431E-17, 10041687p
Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Wallow, Thomas I., Zhang, Chen, Fumar-Pici, Anita, Chen, Jun, Laenens, Bart, Spence, Christopher A., Rio, David, van Adrichem, Paul, Dillen, Harm, Wang, Jing, Yang, Peng-Cheng, Gillijns, Werner, Jaenen, Patrick, van Roey, Frieda, van de Kerkhove, Jeroen, Babin, Sergey
Publikováno v:
Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101451Q-101451Q-1, 913061p
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Autor:
Wallow, Thomas I., Pierson, Bill, Mizuno, Hiroyuki, Fumar-Pici, Anita, Petrillo, Karen, Anderson, Chris N., Naulleau, Patrick P., Hansen, Steven G., Deng, Yunfei, van Ingen Schenau, Koen, Koay, Chiew-Seng, Ohara, Linda, Han, Sang-In, Watso, Robert, Huli, Lior, Burkhardt, Martin, Wood, Obert, Mallmann, Joerg, Kessels, Bart, Routh, Robert
Publikováno v:
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Autor:
Deng, Yunfei, Kye, Jongwook, La Fontaine, Bruno, Wallow, Tom, Wood, Obert, Levinson, Harry, Fumar-Pici, Anita, Mizuno, Hiroyuki, Koay, Chiew-seng, McIntyre, Greg
Publikováno v:
Proceedings of SPIE; Nov2009, Issue 1, p727119-727119-10, 10p
Autor:
Kritsun, Oleg, La Fontaine, Bruno, Sandberg, Richard, Acheta, Alden, Levinson, Harry J., Lensing, Kevin, Dusa, Mircea, Hauschild, Jan, Pici, Anita, Saravanan, Chandra 'Saru', Primak, Kunie, Korlahalli, Rahul, Nirmalgandhi, Srinivasan
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65200L-65200L-10, 10p
Autor:
Saravanan, Chandra Saru, Nirmalgandhi, Srinivasan, Kritsun, Oleg, Acheta, Alden, Sandberg, Richard, La Fontaine, Bruno, Levinson, Harry J., Lensing, Kevin, Dusa, Mircea, Hauschild, Jan, Pici, Anita
Publikováno v:
Proceedings of SPIE; Nov2007, Issue 1, p651806-651806-12, 12p
Autor:
La Fontaine, Bruno, Deng, Yunfei, Dusa, Mircea, Acheta, Alden, Fumar-Pici, Anita, Bolla, Harish, Cheung, Beverly, Singh, Bhanwar, Levinson, Harry J.
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p285-293, 9p
Autor:
La Fontaine, Bruno M., Hauschild, Jan, Dusa, Mircea V., Acheta, Alden, Apelgren, Eric M., Boonman, Marc, Krist, Jouke, Khathuria, Ashok, Levinson, Harry J., Fumar-Pici, Anita, Pieters, Marco
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p570-581, 12p