Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Pho Van Bui"'
Publikováno v:
International Journal of Automation Technology. 15:74-79
Daisetsu Toh, Pho Van Bui, Kazuto Yamauchi, and Yasuhisa Sano, “Photoelectrochemical Oxidation Assisted Catalyst-Referred Etching for SiC (0001) Surface,” Int. J. Automation Technol., Vol.15, No.1, pp. 74-79, 2021.
In a previous study, we de
In a previous study, we de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c5bd7ad5722ba86ac8dbda7982b19984
https://doi.org/10.20965/ijat.2021.p0074
https://doi.org/10.20965/ijat.2021.p0074
Autor:
Pho Van Bui, Daisetsu Toh, Ai Isohashi, Yasuhisa Sano, Satoshi Matsuyama, Ryosuke Ohnishi, Kazuto Yamauchi, Hideka Kida
Publikováno v:
Materials Science Forum. 963:525-529
Catalyst-referred etching (CARE) is an abrasive-free and damage-free polishing method that involves applying a catalytic reaction at the contact point of the catalyst surface and workpiece in a chemical solution. An atomically flat silicon carbide (S
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9537b05737596089d91d349a9791d253
https://doi.org/10.4028/www.scientific.net/msf.963.525
https://doi.org/10.4028/www.scientific.net/msf.963.525
Publikováno v:
The Review of scientific instruments. 91(4)
Daisetsu Toh, Pho Van Bui, Ai Isohashi, Satoshi Matsuyama, Kazuto Yamauchi, and Yasuhisa Sano, "An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating", Review of Scientific Instruments 91,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cb471c1be87b2cb424a4d311de616eaa
https://pubmed.ncbi.nlm.nih.gov/32357724
https://pubmed.ncbi.nlm.nih.gov/32357724
Publikováno v:
International Journal of Automation Technology. 12(2):154-159
Pho Van Bui, Yasuhisa Sano, Yoshitada Morikawa, and Kazuto Yamauchi, “Characteristics and Mechanism of Catalyst-Referred Etching Method: Application to 4H-SiC,” Int. J. Automation Technol., Vol.12, No.2, pp. 154-159, 2018.
A novel abrasive-f
A novel abrasive-f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f8cd18f6c7ee43e9a9ab62977fe90b8f
https://hdl.handle.net/11094/86958
https://hdl.handle.net/11094/86958
Autor:
Pho Van Bui, Daisetsu Toh, Masahiko Kanaoka, Hiromi Okada, Satoshi Matsuyama, Kazuto Yamauchi, Yasuhisa Sano
Publikováno v:
EPJ Web of Conferences. 266:03006
A catalytically assisted etching method, named Catalyst-Referred Etching (CARE) was applied to the planarization of Lithium Niobate (LN) surface, which is widely used for optical waveguides, optical modulators, piezoelectric applications. The study d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a441e798188dd873b118203870b63015
https://doi.org/10.1051/epjconf/202226603006
https://doi.org/10.1051/epjconf/202226603006
Autor:
Daisetsu, Toh, Pho Van, Bui, Ai, Isohashi, Naotaka, Kidani, Satoshi, Matsuyama, Yasuhisa, Sano, Yoshitada, Morikawa, Kazuto, Yamauchi
Publikováno v:
The Review of scientific instruments. 90(4)
A catalytically assisted etching system was developed for the ultra-precision fabrication of optical components, such as X-ray mirrors and extreme-ultraviolet mask blanks. This study demonstrates that an atomically smooth surface with a sub-Angstrom
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::04cf5f64fbc6789e9708a408424d04bf
https://pubmed.ncbi.nlm.nih.gov/31043040
https://pubmed.ncbi.nlm.nih.gov/31043040
Publikováno v:
Materials Science Forum. :726-729
We have developed a novel abrasive-free planarization method, which we term catalyst-referred etching (CARE). In silicon carbide (SiC) CARE, Pt is used as a catalyst and HF solution is used as an etchant. CARE produces a crystallographically undamage
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8c0b4fd2f5dfb4c1c161134a8d9f818
https://doi.org/10.4028/www.scientific.net/msf.778-780.726
https://doi.org/10.4028/www.scientific.net/msf.778-780.726
Autor:
Naotaka Kidani, Kazuto Yamauchi, Ai Isohashi, Pho Van Bui, Daisetsu Toh, Yasuhisa Sano, Satoshi Matsuyama, Yoshitada Morikawa
Publikováno v:
Review of Scientific Instruments. 90:045115
Daisetsu Toh, Pho Van Bui, Ai Isohashi, Naotaka Kidani, Satoshi Matsuyama, Yasuhisa Sano, Yoshitada Morikawa, and Kazuto Yamauchi, "Catalyzed chemical polishing of SiO2 glasses in pure water", Review of Scientific Instruments 90, 045115 (2019), https
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e4858a2ce5c5f905845011b4cd844418
https://doi.org/10.1063/1.5090320
https://doi.org/10.1063/1.5090320
Akademický článek
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.
K zobrazení výsledku je třeba se přihlásit.
Publikováno v:
Materials Science Forum. :510-513
Our group has developed a novel abrasive-free planarization technique known as catalyst-referred etching (CARE). It can produce flat, undamaged, and smooth SiC surfaces with a root-mean-square roughness of less than 0.1 nm over a whole wafer. This st
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c19790ddd53496cd9e843b2ac56249f5
https://doi.org/10.4028/www.scientific.net/msf.740-742.510
https://doi.org/10.4028/www.scientific.net/msf.740-742.510