Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Phj Piet Schellekens"'
Publikováno v:
Sensors and Actuators, A: Physical, 134(2), 374-381. Elsevier
Single crystalline silicon is often used as a base material for micro electromechanical systems (MEMS). A disadvantage from a mechanical point of view is its anisotropic mechanical behavior. A suspension with deformable structures in different crysta
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::59acb924a5c476dfcf6f09565dd10aae
https://doi.org/10.1016/j.sna.2006.05.043
https://doi.org/10.1016/j.sna.2006.05.043
Publikováno v:
Precision Engineering, 30(1), 47-53. Elsevier
A new measurement technique is proposed for the assessment of thermally induced errors of machine tools. The basic idea is to measure changes of length by a telescopic double ball bar (TDBB) at multiple locations in the machine's workspace while the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e4f8930073422fa9703b4e8378be1ed3
https://doi.org/10.1016/j.precisioneng.2005.05.005
https://doi.org/10.1016/j.precisioneng.2005.05.005
Publikováno v:
CIRP Annals. 55:555-558
A pre-prototype measurement machine for measuring the geometry of double side polished wafers has been developed. The measurement principle is based on a scanning double sided Fizeau interferometer with which the front side and the back side flatness
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55bbcb83ed5890c05bb4dae7af89fac9
https://doi.org/10.1016/s0007-8506(07)60481-8
https://doi.org/10.1016/s0007-8506(07)60481-8
Autor:
Phj Piet Schellekens, RH Rob Bergmans, JK Johan van Seggelen, Pcjn Nick Rosielle, Ham Henny Spaan, G. J. W. L. Kotte
Publikováno v:
CIRP Annals : Manufacturing Technology, 54, 487-490. Elsevier
This paper focuses on the on the design and calibration of an elastically guided vertical axis that will be applied in a small high precision 3D Coordinate Measuring Machine aiming a volumetric uncertainty of 25 nm. The design part of this paper disc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4e1d8a821175cb08a7783e2067c9948c
https://doi.org/10.1016/s0007-8506(07)60151-6
https://doi.org/10.1016/s0007-8506(07)60151-6
Publikováno v:
Precision Engineering, 29(2), 229-236. Elsevier
In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these inter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0a8e67ed84067db4c26324807217dbcc
https://doi.org/10.1016/j.precisioneng.2004.09.003
https://doi.org/10.1016/j.precisioneng.2004.09.003
Publikováno v:
Precision Engineering, 26(4), 448-455. Elsevier
The non-linearities in a heterodyne laser interferometer system occurring from the phase measurement system of the interferometer and from non-ideal polarization effects of the optics are modeled into one analytical expression which includes the init
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2b0b65c8dd86c108a2e3bbc528cf40a2
https://doi.org/10.1016/s0141-6359(02)00150-2
https://doi.org/10.1016/s0141-6359(02)00150-2
Publikováno v:
Measurement: Journal of the International Measurement Confederation, 30(4), 241-255. Elsevier
In this paper a method is presented for assessing geometrical errors of multi-axis machines based on volumetric three-dimensional length measurements. A universal machine error model is proposed since a large variety of machine configurations exists.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::31b6081b18a92ff31f8c8191154591be
https://research.tue.nl/en/publications/82ca2850-174e-447d-9256-6983f1c8e507
https://research.tue.nl/en/publications/82ca2850-174e-447d-9256-6983f1c8e507
Publikováno v:
Recent developments in traceable dimensional measurements : 20-21 June, Munich, Germany / Ed. J.E. Decker, 147-157
STARTPAGE=147;ENDPAGE=157;TITLE=Recent developments in traceable dimensional measurements : 20-21 June, Munich, Germany / Ed. J.E. Decker
STARTPAGE=147;ENDPAGE=157;TITLE=Recent developments in traceable dimensional measurements : 20-21 June, Munich, Germany / Ed. J.E. Decker
For the calibration of length standards and instruments, various methods are available for which usually an uncertainty according to the GUM [1] can be set up. However, from calibration data of a measuring instrument it is not always evident what the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3be3f5f5c62e5ec1bd554166a1513cf1
https://doi.org/10.1117/12.445615
https://doi.org/10.1117/12.445615
Publikováno v:
CIRP Annals : Manufacturing Technology, 49(1), 407-410. Elsevier
A new high precision optical diamond turning machine was designed and developed with all ceramic slides, having submicrometer accuracy and mirror surface quality. In view of improving repeatability, basic fundamentals like kinematic design, the Rule
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f883618b6bb8d790fc73a5a8dc26465b
https://doi.org/10.1016/S0007-8506(07)62976-X
https://doi.org/10.1016/S0007-8506(07)62976-X
Publikováno v:
Metrologia, 37(1), 25-33. Institute of Physics
A new class of sensor has recently appeared: nanometre sensors. These sensors are characterized by nanometre or sub-nanometre resolution and an uncertainty of a few nanometres over a range of at least several micrometres. Instruments such as capaciti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9a8f44d199e09b114b45d0be32c34b4d
https://doi.org/10.1088/0026-1394/37/1/4
https://doi.org/10.1088/0026-1394/37/1/4