Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Phillip Geissbühler"'
Autor:
Aseem Srivastava, Carlo Waldfried, Ivan Berry, Dwight Roh, Shijian Luo, Orlando Escorcia, Phillip Geissbühler
Publikováno v:
ECS Transactions. 34:433-438
This paper reports on the techniques employed to control the re-deposition of the partially dissociated organic photoresist (PR) by-products in advanced non-oxidizing strip processes developed to meet the PR removal requirements of future technology
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::425d9fb19f43c716c8e4f3d0c09017ba
https://doi.org/10.1149/1.3567617
https://doi.org/10.1149/1.3567617
