Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment

Autor: Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine, Jean-François Christaud

Publikováno v: Sensors, Vol 23, Iss 22, p 9099 (2023)

Amid the ongoing emphasis on reducing manufacturing costs and enhancing productivity, one of the crucial objectives when manufacturing is to maintain process tools in optimal operating conditions. With advancements in sensing technologies, large amou

Externí odkaz: https://doaj.org/article/a762cf061da7449bbda898dad129dd64

A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data

Autor: Philip Tchatchoua, Mustapha Ouladsine, Michel Juge, Guillaume Graton

Publikováno v: 2021 IEEE 17th International Conference on Automation Science and Engineering (CASE)
CASE
IEEE 17th International Conference on Automation Science and Engineering (CASE)

In industrial processes, keeping equipment units in good operating conditions while reducing maintenance costs is one of the most important objectives to improve productivity. One of the ways to do so is to early detect equipment dysfunction. This ca

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d375218e0551ffd5171ec1a7f1fdcbab