Zobrazeno 1 - 10
of 27
pro vyhledávání: '"Philip Schmitt"'
Autor:
Philip Schmitt, Martin Hoffmann
Publikováno v:
Microsystems & Nanoengineering, Vol 9, Iss 1, Pp 1-10 (2023)
Abstract In this paper, an electrostatic compliant mechanical amplifier intended for force-compensated displacement amplification in MEMS sensor applications is described. Usually, mechanical transformers that enhance a small input displacement into
Externí odkaz:
https://doaj.org/article/6392d18ab1204f41910b85682acfbb99
Publikováno v:
Sensors, Vol 24, Iss 5, p 1677 (2024)
Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle
Externí odkaz:
https://doaj.org/article/2692aee13e594388b7c0148ab8da1e65
Autor:
Philip Schmitt, Martin Hoffmann
Publikováno v:
Micro and Nano Engineering, Vol 15, Iss , Pp 100142- (2022)
This paper presents the design, modeling, fabrication and characterization of a passive micromechanical acceleration sensor intended for condition monitoring. The sensor is composed of purely micromechanical components forming a mechanical integrated
Externí odkaz:
https://doaj.org/article/1bf62ecd8c4c4b939c1d0266bc972cab
Publikováno v:
Actuators, Vol 10, Iss 8, p 182 (2021)
We present the design, fabrication, and characterization of a MEMS-based 3-bit Digital-to-Analog Converter (DAC) that allows the generation of large displacements. The DAC consists of electrostatic bending-plate actuators that are connected to a mech
Externí odkaz:
https://doaj.org/article/c2dcfb95d3a44a4c9d71ede43e07983d
Publikováno v:
Actuators, Vol 10, Iss 8, p 192 (2021)
In recent years, tissue engineering with mechanical stimulation has received considerable attention. In order to manipulate tissue samples, there is a need for electromechanical devices, such as constant-force actuators, with integrated deflection me
Externí odkaz:
https://doaj.org/article/96f641374d1041dc8554fecb5d8cd7f3
Publikováno v:
Proceedings, Vol 2, Iss 13, p 807 (2018)
Autonomous sensors are of interest in all cases where a continuous power source is not available or difficult to realize. Besides harvesting of electrical energy for a complex storage system, it is of interest to directly store an event in a non-elec
Externí odkaz:
https://doaj.org/article/9f36c67dfdcb440194660b7bb1c3f79b
Publikováno v:
Journal of Microelectromechanical Systems. 32:195-207
Autor:
Martin Hoffmann, Philip Schmitt, Steffen Wittemeier, Falk Schaller, Alexey Shaporin, Chris Stöckel, Volker Geneiß, Roman Forke, Christian Hedayat, Ulrich Hilleringmann, Harald Kuhn, Sven Zimmermann
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Autor:
Philip Schmitt, Martin Hoffmann
Publikováno v:
2022 IEEE Sensors.
Autor:
Martin Hoffmann, Philip Schmitt
Publikováno v:
Journal of Microelectromechanical Systems. 29:214-227
In this paper, we introduce a compliant mechanical amplifier (mechAMP) suitable for the sensitivity enhancement in MEMS sensor applications. The design, fabrication and characterization of a planar compliant amplifier mechanism is presented with spec