Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Ph. D'Aux"'
Autor:
Dominique Descamps, Didier Normand, Martin Schmidt, Tiberio Ceccotti, Jean-Marc Weulersse, E. Marquis, Jean-Marie Barbiche, Ph. D'Aux, S. Hulin, R. Bernard, Benoit Barthod, P. Haltebourg, Marc Segers, F. Chichmanian, Olivier Sublemontier, E. Veran, Jean-Francois Hergott, Philippe Cormont, Pierre-Yves Thro, Michel Neu
Publikováno v:
SPIE Proceedings.
Within the PREUVE project, the GAP of CEA Saclay has developed an EUV source that should meet (alpha) -tool specifications by the end of this year. In particular, a laser-produced plasma source has been developed that uses a dense and confined xenon