Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Peterson, Laurie J."'
Publikováno v:
SAE Transactions, 2007 Jan 01. 116, 492-503.
Externí odkaz:
https://www.jstor.org/stable/44719485
Lithographic performance of an ASML i-line step-and-repeat system by using photosensitive Durimides.
Autor:
Pellens, Rudy J. M., van Klaveren, Angelique, Voets, Rutger, van den Heuvel, Jean-Paul, Misat, Sylvain, Waterson, Pamela J., Peterson, Laurie J.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p122-129, 8p