Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Peter Weissbrodt"'
Autor:
Jeffrey Lawrence, Andrew Stockham, Matthias Cumme, Lamarr R. Simmons, Peter Weissbrodt, Gregg T. Borek, John G. Smith, Roman Kleindienst
Publikováno v:
SPIE Proceedings.
Standard UV materials, such as ArF-grade fused silica, have impurities that lead to low transmittance, high absorption, and fluorescence when exposed to high irradiance. Calcium fluoride (CaF2), on the other hand, is a promising material for use as a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8dd196d5acdeb15cc34e7e5d93824afe
https://doi.org/10.1117/12.767531
https://doi.org/10.1117/12.767531
Publikováno v:
SPIE Proceedings.
Many manufacturing techniques have been developed and implemented to fabricate a wide range of micro-optical products. The challenges of the micro-optics business are diverse and tend to resist a widely accepted manufacturing process such as has been
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::02fa50639537568785d5b06f7836a4fb
https://doi.org/10.1117/12.715022
https://doi.org/10.1117/12.715022
Publikováno v:
SPIE Proceedings.
Micro and nano optics enable the control of light for producing intensity distributions with given profiles, propagation properties and polarization states. The higher the requirements on the optical function, the more complicated will be its realizi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ab19571aacf3b3db9dc0405e764260b1
https://doi.org/10.1117/12.625206
https://doi.org/10.1117/12.625206
Publikováno v:
SPIE Proceedings.
We have investigated the propagation of TM-polarized light through periodic Chromium structures. The fabrication of periodic structures was performed with electron-beam lithography. The Chromium layer covered with Chromium Oxide is opaque. Typical sl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::04e33e93c76900bb2e3f8f67733fd431
https://doi.org/10.1117/12.545610
https://doi.org/10.1117/12.545610
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XVIII.
We evaluate the optical response of binary quarter micron slits and gratings in thin opaque chromium layers for measuring critical dimensions on photomasks. At present the CD is typically inspected by time expensive SEM measurements. A main disadvant
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96c7ce85254f441061467390b3397360
https://doi.org/10.1117/12.536311
https://doi.org/10.1117/12.536311
Publikováno v:
SPIE Proceedings.
The spectral response of transparent quarter micron lines in opaque Chromium layers has been studied with visible light. These lines are design elements of binary components used in advanced optical systems for microlithography. In the current fabric
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::00eb49722b64bdd6276f4624f8ae923f
https://doi.org/10.1117/12.482799
https://doi.org/10.1117/12.482799
Autor:
L. Raupach, Dirk-Roger Schmitt, Gabriele A. Ringel, Manfred Schrenk, Peter Weissbrodt, Erich J. Hacker, Helmut H. Toebben
Publikováno v:
SPIE Proceedings.
For future spacecrafts a lot of new UV or x-ray instruments are proposed. To enhance resolution and reduce scattering, new optical materials with optical surfaces with a roughness range of about 0.1 nm, i.e. supersmooth surfaces will be used to build
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0ba15fd1677a88b9d4c4f9bf0e5bfdc6
https://doi.org/10.1117/12.450075
https://doi.org/10.1117/12.450075
Publikováno v:
27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995.
A UHV surface analysis system combined with an optical setup was used in the present work to study the conditioning mechanism on MgF2?/LaF3 HR coatings at 248 nm excimer laser wavelength. During laser irradiation of the sample the laser-induced emiss
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1ab6fae90dbff32ee9a2536ce075463
https://doi.org/10.1117/12.240361
https://doi.org/10.1117/12.240361
Publikováno v:
27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995.
The laser damage thresholds of optical coatings lie, as a rule, markedly below those of the respective bulk materials. This is due to diverse specific realstructure properties with regard to composition, crystallography, microstructure and the physic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::199e213936c0f263fce5c5134dc7345a
https://doi.org/10.1117/12.240376
https://doi.org/10.1117/12.240376
Autor:
C. Fischer, L. Raupach, Erich J. Hacker, Rainer Henking, Bernhard Anton, Heidrun Jaenchen, Detlev Ristau, Peter Weissbrodt, Eric Eva, Norbert Kaiser, Klaus R. Mann, Dirk Mademann
Publikováno v:
SPIE Proceedings.
The design was S L(FIL)9iLL Air, with H: quarterwave layer LaF3 (Norwegian Talc), L: quarterwave layer MgF2 (Balzers),and S: substrate crystalline quartz z-cut (Steeg & Reuter) or crystalline MgF2 (Steeg & Reuter). Film thicknesses and depositionrate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d396e517ecc4e4f94c6632db90e2a964
https://doi.org/10.1117/12.213762
https://doi.org/10.1117/12.213762