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pro vyhledávání: '"Peter Lipscomb"'
Publikováno v:
Retina. 35:1817-1821
To evaluate whether patients with macular pucker (epiretinal membrane [ERM]) and good preoperative visual acuity (20/50 or better) benefit from small-gauge pars plana vitrectomy with membrane peeling.Retrospective chart review of eyes undergoing smal
Autor:
Peter Lipscomb, Alan Heckert, Ronald G. Dixson, Michael T. Stocker, Lei Chen, Richard Kasica, Ravikiran Attota, Hui Zhou, Bryan M. Barnes, Richard M. Silver, George Orji
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXIII.
In this paper we present overlay measurement techniques that use small overlay targets for advanced semiconductor applications. We employ two different optical methods to measure overlay using modified conventional optical microscope platforms. They