Zobrazeno 1 - 10 of 91 pro vyhledávání: '"Peter J. Ludovice"'
1
Understanding and mitigating bridge defects in block copolymer directed self-assembly through computational materials design and optimization
Autor: Jakin B. Delony, Peter J. Ludovice, Clifford L. Henderson
Publikováno v: Advances in Patterning Materials and Processes XXXVII.
Block copolymers (BCPs) are appealing materials to the lithography community because of their potential to extend Moore's Law beyond the 10nm node. Not only do BCPs have the ability to microphase separate into structures such as cylinders and lamella
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3bd8385d78d0bb45de8102d80207dca7
https://doi.org/10.1117/12.2563896
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4
Mitigation of line edge roughness and line width roughness in block copolymer directed self-assembly through polymer composition molecular weight manipulation
Autor: Jakin B. Delony, Peter J. Ludovice, Clifford L. Henderson
Publikováno v: Advances in Patterning Materials and Processes XXXVI.
The semiconductor community is well aware of the challenges that exist in developing lithographic methods that can pattern features at sub-20 nm periodic feature spacing (pitch, L0). Optical lithography already utilizes complex multiple patterning sc
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::de8cdeffbd9b6c9cb6fc72494c07ebdd
https://doi.org/10.1117/12.2526418
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5
Block copolymer line roughness and annealing kinetics as a function of chain stiffness
Autor: Caleb L. Breaux, Clifford L. Henderson, Peter J. Ludovice
Publikováno v: Advances in Patterning Materials and Processes XXXVI.
Block copolymers (BCPs) can phase separate to form periodic structures with small spacings that can be used to form a template. This template can then be used to pattern higher densities of features onto a substrate, thus extending optical lithograph
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3a7e274d9d93c3a02252badd8dedaf62
https://doi.org/10.1117/12.2526417
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6
Humour Applied to STEM Education
Autor: David Hu, Peter J. Ludovice, Lew Lefton
Publikováno v: Systems Research and Behavioral Science. 34:216-226
Humour has been shown to improve elements of the educational experience, but only under certain circumstances. We use Cognitive Load Theory to explain that these circumstances occur when humour does not overload the student's cognitive load. The prob
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0d13715395ad99e97998f872a252548a
https://doi.org/10.1002/sres.2406
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7
Block copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study
Autor: Jakin B. Delony, Peter J. Ludovice, Clifford L. Henderson
Publikováno v: Journal of Vacuum Science & Technology B. 38:032604
Block copolymer (BCP) directed self-assembly (DSA) has been presented as a potential economically attractive enhancement to extend the capabilities of optical lithography for semiconductor manufacturing. One concern in DSA is the level of defectivity
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f126abb32734b87493ce31171876f314
https://doi.org/10.1116/1.5131639
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8
Effect of homopolymer concentration on LER and LWR in block copolymer/homopolymer blends
Autor: Caleb L. Breaux, Peter J. Ludovice, Jakin B. Delony, Clifford L. Henderson
Publikováno v: Novel Patterning Technologies 2018.
Block copolymers (BCPs) can phase separate to form periodic structures with small spacings on the order of the polymer molecular size, thus making BCPs an attractive potential method for extending the resolution limits of optical lithography through
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4904be1cad64084140f162f688cdeaff
https://doi.org/10.1117/12.2318642
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9
Free energy of defects in chemoepitaxial block copolymer directed self-assembly: effect of pattern density and defect position
Autor: Clifford L. Henderson, Peter J. Ludovice, Caleb L. Breaux, Benjamin D. Nation
Publikováno v: SPIE Proceedings.
Block copolymers (BCPs) can phase separate to form periodic structures with small spacings, making BCPs an attractive option for furthering the ability of optical lithography. Chemoepitaxy is a method of directed self-assembly (DSA) that uses prefere
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8658d76491e4d1c7955ac8108b11ac55
https://doi.org/10.1117/12.2276197
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10
Synthesis and self-assembly of high-χ poly(4-tertbutylstyrene)-block-poly(2-hydroxyethylmethacrylate)
Autor: Haibo Li, Bing Li, Peter J. Ludovice, Brandon L. Sharp, Clifford L. Henderson, Mark Neisser, Caleb L. Breaux
Publikováno v: Journal of Vacuum Science & Technology B. 37:011603
Block copolymers (BCPs) are utilized by the microelectronics industry for their ability to phase separate at very small length scales (
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6657371434a1c47635a2ffc3ce18b20e
https://doi.org/10.1116/1.5056256
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