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Autor:
Marie-Christine Zolcinski-Couet, Geoffrey O'Connor, Zoltan Gyarfas, James G. Tsacoyeanes, William Dornfeld, Pradeep K. Govil, Keith W. Andresen, Javed Sumra, Peter J. Baumgartner
Publikováno v:
Microlithographic Techniques in Integrated Circuit Fabrication II.
Micrascan (MS) IV is designed to provide superior Critical Dimension (CD) control & overlay performance at very high wafer throughputs for both 200 and 300mm wafers at low cost of ownership. This new system, targeted for sub-critical applications, in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1068ad4a24e2e68d41208d5d77cbbc6e
https://doi.org/10.1117/12.404856
https://doi.org/10.1117/12.404856
