Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Peter J. Baumgartner"'
Autor:
Marie-Christine Zolcinski-Couet, Geoffrey O'Connor, Zoltan Gyarfas, James G. Tsacoyeanes, William Dornfeld, Pradeep K. Govil, Keith W. Andresen, Javed Sumra, Peter J. Baumgartner
Publikováno v:
Microlithographic Techniques in Integrated Circuit Fabrication II.
Micrascan (MS) IV is designed to provide superior Critical Dimension (CD) control & overlay performance at very high wafer throughputs for both 200 and 300mm wafers at low cost of ownership. This new system, targeted for sub-critical applications, in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1068ad4a24e2e68d41208d5d77cbbc6e
https://doi.org/10.1117/12.404856
https://doi.org/10.1117/12.404856
Autor:
Kim, Kyungsook1 kyungsook.kim@utah.edu, Bou-Ghannam, Sophia1,2, Thorp, Hallie1,2, Grainger, David W.1,2, Okano, Teruo1,3 teruo.okano@utah.edu
Publikováno v:
Scientific Reports. 10/8/2019, Vol. 9 Issue 1, pN.PAG-N.PAG. 1p.
Publikováno v:
Westchester County Business Journal. 8/30/2004, Vol. 43 Issue 35, p34-34. 1/3p.