Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Peter Coon"'
Autor:
Henry Yun, Peter Coon, Grace Ng, Anurag Mittal, Peter Sanchez, Daniel Tanzil, Florence Eschbach, Barbara Greenebaum, Archita Sengupta
Publikováno v:
SPIE Proceedings.
Photomask lifetime has become a challenge since the introduction of high volume manufacturing 193nm photolithograph. Photomask lifetime is being impacted by a broad range of environmental and process factors resulting in inorganics crystals and organ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4412fe7272953a7f13d292c4e107f902
https://doi.org/10.1117/12.617078
https://doi.org/10.1117/12.617078
A Transmission X-ray Microscope (TXM) for Non-destructive 3D Imaging of ICs at Sub-100 nm Resolution
Autor:
David Trapp, Suneeta Neogi, Christopher Kelly, Casey Bennet, Frederick William Duewer, Kenneth W. Nill, Souping Yan, Markus Kuhn, David Scott, Peter Coon, Steve Wang, Wenbing Yun, Shashidar Kamath, Alan Lyon
Publikováno v:
International Symposium for Testing and Failure Analysis.
Xradia has developed a laboratory table-top transmission x-ray microscope, TXM 54-80, that uses 5.4 keV x-ray radiation to nondestructively image buried submicron structures in integrated circuits with at better than 80 nm 2D resolution. With an inte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::343206f184a2dda2f0ddd654810acd6a
https://doi.org/10.31399/asm.cp.istfa2002p0227
https://doi.org/10.31399/asm.cp.istfa2002p0227
Autor:
A. Johnsono, Peter Coon, C. Ayre, Yuri Uritsky, W.F. Steele, F. Gozzo, H. Fujimoto, Howard A. Padmore, T. Renner, G.D. Ackermann, B. Sheridan, R. Ynzunza, P. D. Kinney, Zahid Hussain, Baylor B. Triplett
Publikováno v:
Scopus-Elsevier
Chemical analysis on a microscopic scale was performed on a TiN particle sample on silicon and on two patterned samples using a synchrotron source scanning photoemission microscope. For all the experiments, we exploit the ability, developed in our ex
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::02f99fd601cbe904d50c17199622b0bb
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031627926&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031627926&partnerID=MN8TOARS
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