Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Peter B. Heekenjann"'
Publikováno v:
SPIE Proceedings.
Micromachining requires very precise tools with high resolution. Lasers emitting electromagnetic radiation in the ultraviolet (UV) region offer focussed spot sizes less than one micrometer. Wavelengths in the range of lambda equals 200 to 280 nm are
Publikováno v:
SPIE Proceedings.
In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other mi
Publikováno v:
SPIE Proceedings.
In this paper examinations concerning the laser assisted precision cutting and material removal of Al2O3 based printed boards, structuring of SiC-sealing and bearing rings, and ablation of ferrite ceramics are presented. These investigations were per
Autor:
Peter B. Heekenjann, Holger Schmidt
Publikováno v:
Laser Materials Processing and Machining.
A new UV-optic with an integrated autofocus sensor has been developed for submicron laser processing. In general, a distinction can be made between reflective and refractive objectives. Both have different advantages and disadvantages and, therefore,
Conference
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