Microelectromechanical components in electrical metrology

Autor: Manninen, Antti, Karkkainen, Anu, Pesonen, Nadine, Oja, Aarne, Seppa, Heikki

Publikováno v: A. Manninen, A. Karkkainen, N. Pesonen, A. Oja, and H. Seppa, Applications des MEMS a la metrologie electrique. Techniques de l Ingenieur, traite Mesures et Controle, juin 2007. R 1002, 12 pages (in French)

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology. MEMS-based volt

Externí odkaz: http://arxiv.org/abs/0707.0637

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