Polygon-based compensation of proximity and density effects in photomask processes.

Autor: Kageyama, Kiyoshi, Miyoko, Katsuyuki, Okuda, Yoshimitsu, Perçin, Gökhan, Sezginer, Apo, Carrero, Jesus, Zhu, Alan, Liu, Anwei

Publikováno v: Proceedings of SPIE; Nov2007 Part 2, Issue 1, p67302Y-67302Y-8, 8p

PPC model build methodology: sequential litho and etch verification.

Autor: Mokhberi, Ali, Kamat, Vishnu, Sezginer, Apo, Zach, Franz X., Perçin, Gökhan, Carrero, Jesus, Huang, Hsu-Ting

Publikováno v: Proceedings of SPIE; Nov2006 Part 2, Issue 1, p63491Z-63491Z-8, 8p

Acoustically Actuated Flextensional SiχNγ small gamma and Single-Crystal Silicon 2-D Micromachined Ejector Arrays.

Autor: Demirci, Utkan, Yaralioglu, Goksen G., Heggström, Edward, Perçin, Gökhan, Ergun, Sanli, Khuri-yakub, B. T.

Publikováno v: IEEE Transactions on Semiconductor Manufacturing; Nov2004, Vol. 17 Issue 4, p517-524, 8p

Plate Equations for Piezoelectrically Actuated Flexural Mode Ultrasound Transducers.

Autor: Perçin, Gökhan

Publikováno v: IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control; Jan2003, Vol. 50 Issue 1, p81, 8p, 1 Black and White Photograph, 1 Diagram

Process and proximity correction, and verification for extreme ultraviolet lithography

Autor: Naulleau, Patrick P., Perçin, Gökhan, Dai, Huixiong, Huang, Hsu-Ting, Liu, Anwei, Mokhberi, Ali, Zheng, Xin, Ngai, Chris

Publikováno v: Proceedings of SPIE; April 2013, Vol. 8679 Issue: 1 p86790X-86790X-7, 781118p