Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Peng, Libbert"'
Publikováno v:
ECS Transactions. 18:635-639
In this paper, we share a unique metal and dielectric inhibitor system and the corresponding methodologies in controlling the materials etch rate from the fluoride-containing stripper and the etch rate stability with the bath life time extension. In
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6ada0b43340f2de24b549d6bab52e48e
https://doi.org/10.1149/1.3096513
https://doi.org/10.1149/1.3096513
Publikováno v:
2008 9th International Conference on Solid-State and Integrated-Circuit Technology.
Wet cleaning technology plays a critical role in IC industry, and takes up around 30% of whole process. With the critical dimension continuous shrinking, there are many additional requirements exposed. Among BEOL (back end of line) post etch post ash
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::10734e844ca91635498b6a765b0db597
https://doi.org/10.1109/icsict.2008.4734772
https://doi.org/10.1109/icsict.2008.4734772
Publikováno v:
2015 China Semiconductor Technology International Conference; 2015, p1-5, 5p
Publikováno v:
2014 15th International Conference on Electronic Packaging Technology; 2014, p458-461, 4p
Autor:
Luo, Victor, Chang, Jason, Shi, Kevin, Zhan, Willim, Zhang, Jason, Peng, Libbert, Zhang, David W.
Publikováno v:
ECS Transactions; March 2012, Vol. 44 Issue: 1 p313-317, 5p
Autor:
Luo, Victor, Chang, Jason, Shi, Kevin, Pang, James, Ni, Justin, Zhang, Jason, Peng, Libbert, Wei, David
Publikováno v:
ECS Transactions; March 2012, Vol. 44 Issue: 1 p319-323, 5p
Prevention of AlCu Line Galvanic Corrosion after Fluoride Containing Stripper Cleaning: A Case Study
Publikováno v:
ECS Transactions; March 2011, Vol. 34 Issue: 1 p399-403, 5p
Autor:
Luo, Victor, Ding, John, Zhan, Willim, Peng, Libbert, Wang, Andrew, Liu, Bing, Song, Yuxin, Yin, David D.
Publikováno v:
ECS Transactions; November 2010, Vol. 27 Issue: 1 p321-325, 5p
Publikováno v:
ECS Transactions; March 2009, Vol. 18 Issue: 1 p635-639, 5p
Publikováno v:
ECS Transactions; March 2013, Vol. 52 Issue: 1