Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Pei-Rong Ni"'
Publikováno v:
Microelectronics Reliability. :824-828
The stress distribution and failure of CMOS-MEMS microphone under shock loading was investigated by finite element method in this study. The results show that corners of spring, the anchors connecting spring and fix end and the connection of the spri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::61feb65e4413aeca518b3a3f3fe61827
https://doi.org/10.1016/j.microrel.2018.06.110
https://doi.org/10.1016/j.microrel.2018.06.110
Publikováno v:
Microelectronics Reliability. 112:113749
Considering shock loading on the MEMS microphone is necessary for its reliability assessment since drop of portable devices is a common situation. In this study, the stress distribution and the failures of MEMS capacitive microphone chip by TSMC 0.18
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::422ea144925a4efb528c99f020570b0e
https://doi.org/10.1016/j.microrel.2020.113749
https://doi.org/10.1016/j.microrel.2020.113749