Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Pedreau, R."'
Autor:
Rangelow, I.W., Ivanov, Tzv., Ivanova, K., Volland, B.E., Grabiec, P., Sarov, Y., Persaud, A., Gotszalk, T., Zawierucha, P., Zielony, M., Dontzov, D., Schmidt, B., Zier, M., Nikolov, N., Kostic, I., Engl, W., Sulzbach, T., Mielczarski, J., Kolb, S., Latimier, Du P., Pedreau, R., Djakov, V., Huq, S.E., Edinger, K., Fortagne, O., Almansa, A., Blom, H.O.
Publikováno v:
In Microelectronic Engineering 2007 84(5):1260-1264
Autor:
Gotszalk, T., Zawierucha, P., Woszczyna, M., Zielony, M., Ivanov, T., Ivanova, K., Volland, B. E., Sarov, Y., Persaud, A., Dontzov, D., Schmidt, B., Nikolov, N., Kostic, I., Engl, W., Sulzbach, T., Mielczarski, J., Kolb, S., Pedreau, R., Huq, S. E., Edinger, K., Fortagne, O., Blom, H. O., Rangelow, I. W.
Publikováno v:
34th Micro and Nano Engineering Conference MNE08, 15.-18.09.2008, Athens, Greece
Main industry requirement for applying scanning probe microscopy in surface measurements is the high scan speed, which allow the microelectronics producers to obtain the information about the technological process quality in-situ on the semiconductor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______4577::3922a5051aaefd56c82b9b69783630bf
https://www.hzdr.de/publications/Publ-12183-1
https://www.hzdr.de/publications/Publ-12183-1