Chemical Mechanical Planarization and Old Italian Violins

Autor: Philipossian, Ara, Sampurno, Yasa, Peckler, Lauren

Previous studies have shown that spectral analysis based on force data can elucidate fundamental physical phenomena during chemical mechanical planarization (CMP). While it has not been literally described elsewhere, such analysis was partly motivate

Externí odkaz: http://hdl.handle.net/10150/627056
http://arizona.openrepository.com/arizona/handle/10150/627056

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Stability of SiGe(100) Surfaces after Ammonium Sulfide Passivation

Autor: Lynn, Stacy, Peckler, Lauren, Muscat, Anthony J.

Publikováno v: ECS Transactions; August 2017, Vol. 80 Issue: 2 p147-153, 7p

Chemical Mechanical Planarization and Old Italian Violins.

Autor: Philipossian A; Araca, Inc., Tucson, AZ 85718, USA. ara@email.arizona.edu.; Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, USA. ara@email.arizona.edu., Sampurno Y; Araca, Inc., Tucson, AZ 85718, USA. yasayap@email.arizona.edu.; Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, USA. yasayap@email.arizona.edu., Peckler L; Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, USA. razzie84@email.arizona.edu.

Publikováno v: Micromachines [Micromachines (Basel)] 2018 Jan 18; Vol. 9 (1). Date of Electronic Publication: 2018 Jan 18.