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pro vyhledávání: '"Pavel L. Novikov"'
Publikováno v:
physica status solidi c. 14:1700200
Large-area periodical pattern on Si(100) was fabricated using combination of nanoimprint lithography and ion irradiation through mask. Ordered structures with grooves and ridges were prepared by the selective etching of regions amorphized by ion irra
Autor:
Novikov, Pavel L., Atovullaev, Timur, Smagina, Zhanna V., Dvurechenskii, Anatoly V., Pavskii, Kirill V.
Publikováno v:
Physica Status Solidi (C); Dec2017, Vol. 14 Issue 12, pn/a-N.PAG, 4p