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Publikováno v:
2018 IEEE Micro Electro Mechanical Systems (MEMS).
Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bc0daa97d33debdbe3b790ddfccdbbd4
https://doi.org/10.1109/memsys.2018.8346667
https://doi.org/10.1109/memsys.2018.8346667
