Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Paul Laberge"'
Autor:
Sufi Zafar, Bradley Melnick, Paul Laberge, R. L. Hance, S.J. Gillespie, Peir Chu, Robert E. Jones, Bruce E. White, Vidya Kaushik, D. J. Taylor, Peter Zurcher
Publikováno v:
Journal of Applied Physics. 82:4469-4474
The effect of hydrogen on strontium bismuth tantalate (SrBi2Ta2O9; SBT) ferroelectric capacitors is investigated. Using several analytical techniques such as x-ray diffraction, electron diffraction, Auger electron, scanning and transmission electron
Publikováno v:
International Symposium for Testing and Failure Analysis.
The identification of foreign material at metal-oxide interface or at the poly-substrate interface by means energy dispersive spectroscopy (EDS) is very difficult. Auger depth profiling can be used as an alternative method to cross-section EDS analys