Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Paul G Karakatsanis"'
Autor:
Stefan Jank, Vlad Temchenko, Paul G Karakatsanis, Ramana Veerasingam, Rakesh Vallishayee, Christoph Dolainsky, Xiaojing Yang, Bong-Ryoul Choi, Youval Nehmadi, Moshe Poyastro
Publikováno v:
2006 IEEE International Symposium on Semiconductor Manufacturing.
Deploying OPC that is robust over the process window is becoming more and more challenging as geometries shrinki ii. This challenge has a major impact in time-to-market and yield of new products. This paper describes a litho simulator calibration flo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56a01e026546abbce896b8fd6d594b4a
https://doi.org/10.1109/issm.2006.4493134
https://doi.org/10.1109/issm.2006.4493134
