Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Paul C. Melcher"'
Publikováno v:
2012 IEEE International Power Modulator and High Voltage Conference (IPMHVC).
Solid state pulsed power systems have been designed and implemented in Cymer's Deep Ultraviolet (DUV) lithography light source products for over 20 years. Product reliability is critical for semiconductor photolithography processing and is driven by
Publikováno v:
2005 IEEE Pulsed Power Conference.
Capacitor loss in pulsed power systems has become an important issue for thermal management, especially when the operating rep-rate and energy per pulse are getting higher and higher. It is practical to analyze the loss of a capacitor using a capacit
Autor:
Richard M. Ness, B. M. Huhman, Paul C. Melcher, Chaofeng Huang, K.F. McDonald, R. Burdt, Randy D. Curry
Publikováno v:
2005 IEEE Pulsed Power Conference.
Recent advances in nanocrystalline magnetic materials and core insulation techniques are believed to be superior to the current magnetic cores that are employed as saturable switches in solid-state, repetitive magnetic pulse compressors. Accordingly,
Publikováno v:
Conference Record of the Twenty-Sixth International Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop..
This paper will summarize over 10 years of solid state pulsed power development at Cymer Inc. associated with power systems for excimer and other light sources used in the application of semiconductor photolithography. Over eight different generation
Publikováno v:
Conference Record of the Twenty-Sixth International Power Modulator Symposium, 2004 and 2004 High-Voltage Workshop..
High voltage IGBTs and series diodes are used in Cymer's solid-state pulsed power commutator module. The IGBTs and series diode losses in the module affect the cooling system design and the energy transfer efficiency. It is difficult to estimate the
Publikováno v:
Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop..
In certain applications for excimer lasers, it is critical to maintain the timing of a solid state pulsed power module (SSPPM) such that the pulsed output of the laser can be synchronized to another external event. In some cases, this synchronization
Publikováno v:
PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251).
Summary form only given, as follows. Since 1996, CYMER has manufactured over 1500 excimer lasers for the application of integrated circuit photolithography. Because reliability and cost of operation (CoO) are critical in the semiconductor industry, i
Autor:
Dmitri V. Gaidarenko, Thomas Hofmann, Scot T. Smith, Kyle R. Webb, Herve A. Besaucele, William N. Partlo, Rick Eis, Paul C. Melcher, Vladimir B. Fleurov, Alexander I. Ershov, Bernard K. Nikolaus, Palash P. Das, Jean-Marc Hueber
Publikováno v:
SPIE Proceedings.
We report the performance of a very high repetition rate ArF laser optimized for next generation, high NA, high throughput scanner. The laser's repetition rate exceeds 4kHz, at 5mJ, and at bandwidths of less than 1.2 pm. We discuss the complexity of
Autor:
Paul C. Melcher, Alexander I. Ershov, Todd J. Embree, Palash P. Das, Herve A. Besaucele, Steven L. Grove, Vladimir B. Fleurov, Richard M. Ness, Thomas P. Duffey, Gunasiri G. Padmabandu
Publikováno v:
SPIE Proceedings.
Exposure tools for 193nm lithography are expected to use Argon-Fluoride lasers at repetition rates of at least 2kHz. We are showing that, by revisiting several key technologies, the performance and reliability of ArF lasers at 2 kHz are trending towa
Publikováno v:
Scopus-Elsevier
The Cymer Master Oscillator Power Amplifier (MOPA)-based light source requires tight timing control over all operating repetition rates. The newly developed IGBT gate driver allows tight control of the IGBT's turn on/off timing jitter and drift. Its
Externí odkaz:
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