Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Paul Blackborow"'
Autor:
Huiling Zhu, Paul Blackborow
Publikováno v:
Journal of Microelectronic Manufacturing, Vol 2, Iss 1 (2019)
Laser-driven light sources (LDLS) have ultrahigh-brightness and broad wavelength range. They are ideal radiation sources for optical metrology tools for advanced process control in semiconductor manufacturing. LDLS sources, with their advantages of 1
Externí odkaz:
https://doaj.org/article/f9baa1f1be2b4a0dbbe61a0a65ef3764
Autor:
Paul Blackborow, Huiling Zhu
Publikováno v:
Journal of Microelectronic Manufacturing, Vol 2, Iss 1 (2019)
Laser-driven light sources (LDLS) have ultrahigh-brightness and broad wavelength range. They are ideal radiation sources for optical metrology tools for advanced process control in semiconductor manufacturing. LDLS sources, with their advantages of 1
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::45f3b5f969de0f372a126ed8264269d0
https://doi.org/10.33079/jomm.19020104
https://doi.org/10.33079/jomm.19020104
Autor:
Donald K. Smith, Matthew J. Partlow, Deborah S. Gustafson, Ron Collins, Paul Blackborow, Matthew M. Besen, Stephen F. Horne
The EQ-10 is a discharge-produced plasma Z-pinch source operating in xenon, which relies on induction via a transformer core rather than conduction via electrodes to generate the Z-pinch current. In the basic design, the transformer primary circuit c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0664559b1ae1f26dd9ce756ee7ac8185
https://doi.org/10.1117/3.2305675.ch4a
https://doi.org/10.1117/3.2305675.ch4a
