RF MEMS Zipping Varactor With High Quality Factor and Very Large Tuning Range

Autor: David A. Darbyshire, Mihai Rotaru, Suan Hui Pu, Paul B. Kirby, Robert V. Wright, Andrew S. Holmes, Eric M. Yeatman

Publikováno v: IEEE Electron Device Letters. 37:1340-1343

An RF MEMS zipping analog varactor with a high-permittivity bismuth zinc niobate dielectric has been fabricated and characterized. The varactor can be continuously tuned from 10 to 280 fF, with a very large tuning range of 2700%. By use of gold elect

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6c86255bc592d5967c3bc48d15408caa
https://doi.org/10.1109/led.2016.2600264

Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems

Autor: Charalampos Fragkiadakis, Paul B. Kirby, Valeria Kilchytska, Petros Gkotsis, Laurent Francis, J-P Raskin

Publikováno v: Journal of Microelectromechanical Systems. 21:1471-1483

Microelectromechanical systems (MEMS) technology is expected to play a significant role in avionics and in future space missions provided that the effect of radiation on the reliability of MEMS devices is well understood. Most tests, to date, have be

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e333af9b6703a9979c16b0f7b0fa8f88
https://doi.org/10.1109/jmems.2012.2211578

Development of high concentrated aqueous silver nanofluid and inkjet printing on ceramic substrates

Autor: Qi Zhang, Robert V. Wright, A. Kosmala, Paul B. Kirby

Publikováno v: Materials Chemistry and Physics. 132:788-795

In this paper, the formulation of a high Ag loading (45 wt%) aqueous ink and its subsequent printing on three different ceramic substrates were reported. Monodispersed Ag nanoparticles with a size down to 10 nm were successfully synthesized in aqueou

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f8e544f5e1aa7d82a1be9fd2693b6cc7
https://doi.org/10.1016/j.matchemphys.2011.12.013

Wafer-level transfer technologies for PZT-based RF MEMS switches

Autor: Zlatoljub D Milosavljevic, Michel Despont, Paul B. Kirby, Richard Stutz, Tauno Vähä-Heikkilä, P. Rantakari, Roland Guerre, Debabrata Bhattacharyya, Ute Drechsler, Robert V. Wright

Publikováno v: Guerre, R, Drechsler, U, Bhattacharyya, D, Rantakari, P, Stutz, R, Wright, R V, Milosavljevic, Z D, Vähä-Heikkilä, T, Kirby, P B & Despont, M 2010, ' Wafer-level transfer technologies for PZT-based RF MEMS switches ', Journal of Microelectromechanical Systems, vol. 19, no. 3, pp. 548-560 . https://doi.org/10.1109/JMEMS.2010.2047005

We report on wafer-level transfer technologies to integrate PZT-based radio frequency (RF) microelectromechanical-systems switches on CMOS. Such heterogeneous integration can overcome the incompatibility of PZT material with back-end-of-the-line (BEO

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c7a29c36d0a50c7453302cbe4912ede5
https://cris.vtt.fi/en/publications/124bc657-5621-4121-9e05-edc845fe43be

Determination of piezoelectric coefficients and elastic constant of thin films by laser scanning vibrometry techniques

Autor: F. F. C. Duval, Robert V. Wright, H.C. Chung, Paul B. Kirby, Zhaorong Huang, Glenn J. T. Leighton, Roger W. Whatmore

Publikováno v: Sensors and Actuators A: Physical. 135:660-665

Knowledge of the electro-active properties of piezoelectric materials is essential for the modeling and design of novel MEMS devices employing the piezoelectric effect. Cantilevers of piezoelectric thin film on Si were fabricated by using sol–gel a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7ecca82b54b5b94ecc535d7422ad5a6b
https://doi.org/10.1016/j.sna.2006.10.002