Zobrazeno 1 - 10
of 64
pro vyhledávání: '"PauLeau, Yves"'
Publikováno v:
In Thin Solid Films 26 March 1999 342(1-2):207-213
Autor:
Holleman, J., Pauleau, Yves
Publikováno v:
Chemical Physics of Thin Film Deposition Processes for Micro-and Nano-Technologies, 171-198
STARTPAGE=171;ENDPAGE=198;TITLE=Chemical Physics of Thin Film Deposition Processes for Micro-and Nano-Technologies
Chemical Physics of Thin Film Deposition Processes for Micro-and Nano-Technologies ISBN: 9781402005251
STARTPAGE=171;ENDPAGE=198;TITLE=Chemical Physics of Thin Film Deposition Processes for Micro-and Nano-Technologies
Chemical Physics of Thin Film Deposition Processes for Micro-and Nano-Technologies ISBN: 9781402005251
Selective area deposition has received much attention in IC technology in the past forty years. Its advantage in IC technology is that one saves a mask and a full sequence of lithography, etching, resist removal and cleaning. In Selective Chemical Va
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d83951d33db9d8193aa6adcf14d9d4b6
https://doi.org/10.1007/978-94-010-0353-7_8
https://doi.org/10.1007/978-94-010-0353-7_8
Publikováno v:
Thin Solid Films
518 1363 1364 1363-1364
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______4485::5761ae88171e88b107b355759d63c710
http://gnosis.library.ucy.ac.cy/handle/7/48709
http://gnosis.library.ucy.ac.cy/handle/7/48709
Publikováno v:
Spring Meeting of the European Materials Research Society, Symposium on Protective Coatings and Thin Films-07
Spring Meeting of the European Materials Research Society, Symposium on Protective Coatings and Thin Films-07, May 2007, Strasbourg, France
Surf. Coat. Technol
Surf. Coat. Technol, 2008, 202, pp.2282-2286
Spring Meeting of the European Materials Research Society, Symposium on Protective Coatings and Thin Films-07, May 2007, Strasbourg, France
Surf. Coat. Technol
Surf. Coat. Technol, 2008, 202, pp.2282-2286
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::33e8cd78b4b6b6e2bf82c01d6bf713f3
https://hal.archives-ouvertes.fr/hal-00291627
https://hal.archives-ouvertes.fr/hal-00291627
Publikováno v:
Spring Meeting of the European Materials Research Society, Symposium on Protective Coatings and Thin Films 07
Spring Meeting of the European Materials Research Society, Symposium on Protective Coatings and Thin Films 07, May 2007, Strasbourg, France
Spring Meeting of the European Materials Research Society, Symposium on Protective Coatings and Thin Films 07, May 2007, Strasbourg, France
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::aea1201c563d63b4487fc69455febcc5
https://hal.archives-ouvertes.fr/hal-00291622
https://hal.archives-ouvertes.fr/hal-00291622
Publikováno v:
Fall Meeting of the European Materials Research Society (E-MRS)
Symposium on Nanostructured Composite Films : Synthesis, Characterization, Properties and Applications
Symposium on Nanostructured Composite Films : Synthesis, Characterization, Properties and Applications, Sep 2006, Varsaw, Poland
Revue Adv. Mater. Sci
Revue Adv. Mater. Sci, 2007, 15, pp.127-133
Rev. Adv. Mater. Sci.
Rev. Adv. Mater. Sci., 2007, 15, pp. 127-133
Symposium on Nanostructured Composite Films : Synthesis, Characterization, Properties and Applications
Symposium on Nanostructured Composite Films : Synthesis, Characterization, Properties and Applications, Sep 2006, Varsaw, Poland
Revue Adv. Mater. Sci
Revue Adv. Mater. Sci, 2007, 15, pp.127-133
Rev. Adv. Mater. Sci.
Rev. Adv. Mater. Sci., 2007, 15, pp. 127-133
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::993b7fff704eb7a3ac38f90876bc2eed
https://hal.archives-ouvertes.fr/hal-00407408
https://hal.archives-ouvertes.fr/hal-00407408