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pro vyhledávání: '"Patrick R. Guthrie"'
Autor:
Steven R. Droes, Mark A. Crowder, Apostolos T. Voutsas, Mikel M. Atkinson, Patrick R. Guthrie
Publikováno v:
SPIE Proceedings.
For laser crystallization of amorphous silicon, plasma enhanced chemical vapor deposition (PECVD) is the method of choice for a-Si precursor deposition. This situation is likely to change, however, with the transition to higher performance polysilico