Výsledky vyhledávání - "Patrick Abbott"

Effect of average grain size on the work function of diamond films

Autor: Edward D. Sosa, David E. Golden, Patrick Abbott

Publikováno v: Applied Physics Letters. 79:2835-2837

The work function of hydrogen-terminated polycrystalline diamond films deposited by electrophoresis on molybdenum was studied using ultraviolet photoelectron spectroscopy with 21.2 eV photons for average grain sizes ranging from 0.32 to 108 μm. The

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::adb578de5bf8643b9a81b67eb1e6f56d
https://doi.org/10.1063/1.1412825

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Dynamic stability of field emission from molybdenum microtips exposed to oxygen

Autor: Patrick Abbott, Edward D. Sosa, David E. Golden

Publikováno v: Applied Physics Letters. 78:3899-3901

The emission current in a molybdenum field emission array can decrease by 50% in 1000 s at an oxygen pressure of 10−6 Torr. To overcome this disadvantage of molybdenum microtips, the effectiveness of dynamic surface cleaning has been investigated i

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::59ca2db79a85c76ec839d34186ba3fd3
https://doi.org/10.1063/1.1378804

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Microbridge and e-test opens defectivity reduction via improved filtration of photolithography fluids

Autor: Michael Mesawich, Barry Gotlinsky, Santos Reyes, Mario A. Rivera, Jeremy Marzani, Michael Sevegney, Patrick Abbott

Publikováno v: Advances in Resist Materials and Processing Technology XXVI.

Reduced tolerance for defectivity is a well-documented consequence of the semiconductor industry's constant progress toward smaller IC device dimensions. Among all manufacturing functional areas, photolithography is arguably the most sensitive to pro

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b00f009920e541212f720b750987e513
https://doi.org/10.1117/12.814374

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