Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Patricia Scialdone"'
Autor:
David J. Brzozowy, Patricia Scialdone, Medhat A. Toukhy, Rodney J. Hurditch, Steven G. Hansen, Karin R. Schlicht, Peggy M. Spragg
Publikováno v:
Advances in Resist Technology and Processing XI.
Photospeed measures of functional performance are widely employed for the characterization, quality control, and quality assurance of photoresists in both their manufacture and end use. In this paper we investigate from both a theoretical and experim
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::caa4fb1ccde43c5f052b7845745ae333
https://doi.org/10.1117/12.175375
https://doi.org/10.1117/12.175375
