Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Pascal Metzger"'
Autor:
Emilie Bourjot, Alice Bond, Carine Ladner, Nicolas Bresson, Stephane Moreau, Viorel Balan, Arnaud Cornelis, Renan Bouis, Catherine Euvrard, Noura Nadi, Loic Sanchez, Frank Fournel, Nicolas Raynaud, Pascal Metzger, Eric Ollier
Publikováno v:
2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC).
Autor:
Emilie Bourjot, Noura Nadi, Frank Fournel, Loic Sanchez, Severine Cheramy, Nicolas Raynaud, C. Castan, Alice Bond, Pascal Metzger, N. Bresson
Publikováno v:
2021 IEEE 71st Electronic Components and Technology Conference (ECTC).
Die-to-wafer direct hybrid bonding process is foreseen as a key enabler of heterogeneous 3D integration. Hybrid bonding technologies were first developed on W2W assembly reaching 3D interconnection pitch of $1\mu\mathrm{m}$ . Recently, CEA-Leti demon
Autor:
Severine Cheramy, A. Jouve, Frank Fournel, N. Bresson, Loic Sanchez, Nicolas Raynaud, Pascal Metzger
Publikováno v:
2018 7th Electronic System-Integration Technology Conference (ESTC).
3D vertical integration of components is today an industrial reality. To reduce pitch of interconnection between the dice, the hydrid bonding technique, offering sub-10 $\mu$m interconnection pitch, is widely demonstrated for Wafer-to-Wafer bonding.
Autor:
Caroline Avrillier, Pascal Metzger
Publikováno v:
2017 21st European Microelectronics and Packaging Conference (EMPC) & Exhibition.
This paper presents considerations on key parameters to obtain a high accuracy flip-chip bonding. Mutual interaction between three main blocks, the flip-chip bonder, the components to be bonded and the environment where the process is done is crucial