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pro vyhledávání: '"Pascal Gardes"'
Autor:
Virgil Guillon, Benoit Riou, Jérôme Billoué, Thomas Defforge, Pascal Gardes, Micka Bah, Gaël Gautier
Publikováno v:
Journal of Applied Physics. 132:234103
In this paper, the nanolamination of a ZrO2 insulator by Al2O3 for metal insulator metal capacitor applications has been studied. The insulating layers (ZrO2 and Al2O3) were deposited by atomic layer deposition and the electrodes were made of TiN. Di
Autor:
Stephane Forster, Emilien Bouyssou, Sylvain Charley, Pascal Gardes, Marianne Diatta, Alexandra Trupkovic
Publikováno v:
ECS Transactions. 61:155-163
Over the past few years, ferroelectric thin films have been widely considered for the development of tunable microwave device [1]. One of the best candidates identified so far for such applications is BaxSr1-xTiO3 (BST) material, which exhibits a sig