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pro vyhledávání: '"Parastoo Baghaei Raveri"'
Autor:
Bahareh Gholamzadeh, Falah Awwad, Sebastian Magierowski, Mohamad Sawan, Martin Matynia, Parastoo Baghaei Raveri, Giancarlo Ayala-Charca, Ebrahim Ghafar-Zadeh
Publikováno v:
Microsystem Technologies. 23:4591-4598
This paper presents a new approach towards the development of a spirometer-on-chip device for point-of-care diagnostics. The proposed device consists of a cantilever based airflow sensor fabricated through a multi-user MEMS process. The deflection of