Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Pandolfi, RJ"'
Autor:
Freychet, G, Cordova, IA, McAfee, T, Kumar, D, Pandolfi, RJ, Anderson, C, Dhuey, SD, Naulleau, P, Wang, C, Hexemer, A
Publikováno v:
Journal of Micro/Nanopatterning Materials and Metrology, vol 18, iss 2
Journal of Micro/ Nanolithography, MEMS, and MOEMS, vol 18, iss 2
Journal of Micro/ Nanolithography, MEMS, and MOEMS, vol 18, iss 2
Extreme ultraviolet (EUV) lithography is one of the most promising printing techniques for high-volume semiconductor manufacturing at the 14-nm half-pitch device node and beyond. However, key challenges around EUV photoresist materials, such as the e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3431604d4c499040dad7a4cbbe913dcd
https://escholarship.org/uc/item/2tx9f6b3
https://escholarship.org/uc/item/2tx9f6b3
Autor:
Freychet, G, Cordova, IA, McAfee, T, Kumar, D, Pandolfi, RJ, Anderson, C, Naulleau, P, Wang, C, Hexemer, A
Extreme ultraviolet lithography is one of the most promising printing techniques for high volume semiconductor manufacturing at the 14 nm half-pitch device node and beyond. However, key challenges around EUV photoresist materials such as the exposure
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::23f11b2aac485b69b8daec07da932565
https://escholarship.org/uc/item/0ct1479n
https://escholarship.org/uc/item/0ct1479n
Autor:
Zhao Z; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Chavez T; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Holman EA; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Hao G; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Green A; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Krishnan H; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720.; Center for Advanced Mathematics for Energy Research Applications (CAMERA), Lawrence Berkeley National Laboratory, Berkeley, CA 94720., McReynolds D; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Pandolfi RJ; Center for Advanced Mathematics for Energy Research Applications (CAMERA), Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Roberts EJ; Center for Advanced Mathematics for Energy Research Applications (CAMERA), Lawrence Berkeley National Laboratory, Berkeley, CA 94720.; Molecular Biophysics and Integrated Bioimaging Division (MBIB), Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Zwart PH; Center for Advanced Mathematics for Energy Research Applications (CAMERA), Lawrence Berkeley National Laboratory, Berkeley, CA 94720.; Molecular Biophysics and Integrated Bioimaging Division (MBIB), Lawrence Berkeley National Laboratory, Berkeley, CA 94720., Yanxon H; Advanced Photon Source, Argonne National Laboratory, Lemont, IL 60439., Schwarz N; Advanced Photon Source, Argonne National Laboratory, Lemont, IL 60439., Sankaranarayanan S; Center for Nanoscale Materials (CNM), Argonne National Laboratory, Lemont, IL 60439.; Department of Mechanical and Industrial Engineering, University of Illinois Chicago, Chicago, IL 60607., Kalinin SV; Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37830., Mehta A; SLAC National Accelerator Laboratory, Menlo Park, CA 94025., Campbell SI; National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973., Hexemer A; Advanced Light Source (ALS) Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720.
Publikováno v:
Annual Workshop on Extreme-scale Experiment-in-the-Loop Computing : XLOOP. Annual Workshop on Extreme-scale Experiment-in-the-Loop Computing [Annu Workshop Extrem Scale Exp Loop Comput] 2022 Nov; Vol. 2022, pp. 10-15.
Autor:
Pandolfi RJ; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Allan DB; National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY, USA., Arenholz E; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Barroso-Luque L; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Campbell SI; National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY, USA., Caswell TA; National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY, USA., Blair A; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., De Carlo F; Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, IL, USA., Fackler S; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Fournier AP; Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, CA, USA., Freychet G; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Fukuto M; National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY, USA., Gürsoy D; Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, IL, USA., Jiang Z; Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, IL, USA., Krishnan H; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Kumar D; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Kline RJ; National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD, USA., Li R; National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY, USA., Liman C; National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD, USA., Marchesini S; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Mehta A; Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, CA, USA., N'Diaye AT; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Parkinson DY; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Parks H; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Pellouchoud LA; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Perciano T; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Ren F; Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, CA, USA., Sahoo S; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Strzalka J; Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, IL, USA., Sunday D; National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD, USA., Tassone CJ; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Ushizima D; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Venkatakrishnan S; Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN, USA., Yager KG; Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY, USA., Zwart P; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Sethian JA; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA., Hexemer A; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA.
Publikováno v:
Journal of synchrotron radiation [J Synchrotron Radiat] 2018 Jul 01; Vol. 25 (Pt 4), pp. 1261-1270. Date of Electronic Publication: 2018 May 31.
Autor:
Rodarte AL; Department of Physics, University of California, Merced, 5200 Lake Rd, Merced, CA95343, USA. lhirst@ucmerced.edu., Cao BH, Panesar H, Pandolfi RJ, Quint M, Edwards L, Ghosh S, Hein JE, Hirst LS
Publikováno v:
Soft matter [Soft Matter] 2015 Mar 07; Vol. 11 (9), pp. 1701-7.
Autor:
Amaral JJ; Physics, School of Natural Sciences, University of California, 5200 N. Lake Rd, Merced CA 95343, USA. lhirst@ucmerced.edu sghosh@ucmerced.edu., Wan J, Rodarte AL, Ferri C, Quint MT, Pandolfi RJ, Scheibner M, Hirst LS, Ghosh S
Publikováno v:
Soft matter [Soft Matter] 2015 Jan 14; Vol. 11 (2), pp. 255-60.
Autor:
Pandolfi RJ; University of California, Merced, 5200 North Lake Road, Merced, California 95343, USA., Edwards L; University of California, Merced, 5200 North Lake Road, Merced, California 95343, USA., Johnston D; University of California, Merced, 5200 North Lake Road, Merced, California 95343, USA., Becich P; University of California, Merced, 5200 North Lake Road, Merced, California 95343, USA., Hirst LS; University of California, Merced, 5200 North Lake Road, Merced, California 95343, USA.
Publikováno v:
Physical review. E, Statistical, nonlinear, and soft matter physics [Phys Rev E Stat Nonlin Soft Matter Phys] 2014 Jun; Vol. 89 (6), pp. 062602. Date of Electronic Publication: 2014 Jun 20.
Autor:
Rodarte AL; Department of Physics, School of Natural Sciences, University of California, Merced, 5200 Lake Rd, Merced, CA 95343 (USA)., Nuno ZS, Cao BH, Pandolfi RJ, Quint MT, Ghosh S, Hein JE, Hirst LS
Publikováno v:
Chemphyschem : a European journal of chemical physics and physical chemistry [Chemphyschem] 2014 May 19; Vol. 15 (7), pp. 1413-21. Date of Electronic Publication: 2014 Feb 12.