Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Pan Xianzheng"'
Publikováno v:
Journal of Applied Physics; 2/1/1994, Vol. 75 Issue 3, p1758, 6p, 2 Black and White Photographs, 1 Diagram, 4 Graphs
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :233-236
The effects of ion bombardment on the structure and properties of metal films were studied. Ag, Al and Cu films were deposited on Si(111) substrates by ion-assisted deposition (IAD). The bombarding energy was varied in the range of 200–5000 eV, and
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :1110-1112
Low-energy H2+ ions were implanted into polysilicon solar cells to passivate the electrically active centers which existed in grains and grain boundaries. The illuminative and dark characteristics of solar cells were significantly improved. Measureme
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1995, Vol. 13 Issue 3, p1628-1632, 5p
Autor:
Gruen, Dieter M., Pan, Xianzheng, Krauss, Alan R., Liu, Shengzhong, Luo, Jianshu, Foster, Christopher M.
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1994, Vol. 12 Issue 4, p1491-1495, 5p
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :136-139
A new type of ion source for refractory elements was developed for low energy ion beam deposition. The source was made by employing a pair of plate shape sputtering electrodes in an inductance coupled rf ion source. The electrode was composed of the
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 39:692-695
Diamondlike carbon films (DLCFs) were prepared from benzene vapor by rf plasma chemical vapor deposition (PCVD) and non-mass-analysed (NMA) low energy ion beam deposition. It was found that the structure of the films is influenced by deposition condi
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