Boron-Terminated Polystyrene as Potential Spin-on Dopant for Microelectronic Applications.

Autor: Aliberti, Cristiano, Antonioli, Diego, Sparnacci, Katia, Gianotti, Valentina, Laus, Michele, Paleari, Giovanni, Arduca, Elisa, Seguini, Gabriele, Perego, Michele

Publikováno v: AIP Conference Proceedings; 2018, Vol. 1981 Issue 1, p020173-1-020173-4, 4p, 1 Diagram, 3 Graphs