Stepper based maskless microlithography using a liquid crystal display for massively parallel direct-write of binary and multilevel microstructures

Autor: Kessels, Melanie, El Bouz, Marwa, Pagan, Robin, Heggarty, Kevin

Publikováno v: Journal of Micro/Nanolithography, MEMS, and MOEMS
Journal of Micro/Nanolithography, MEMS, and MOEMS, Society of Photo-optical Instrumentation Engineers, 2007, 6 (3), pp.033002. ⟨10.1117/1.2767331⟩

International audience; A versatile photolithographic photoplotter based on a standard photoreduction stepper where the reticle is replaced by a commercial liquid crystal microdisplay is reported. The microdisplay module is designed as a drop-in repl

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::b63601b6c594dc1f109ff522de975df8
https://hal-imt-atlantique.archives-ouvertes.fr/hal-01974805/file/JM3_Article_MPP.pdf

Letters.

Autor: Sell, Alan P. F., Fox, Paul, Churcher, John, Smith, Angela, Alker, Adrian, Tetlow, Richard, Griffiths, Sandra, Brown, Sonya, Story, Robin, Goodwin, Philip, Burrell, Andrew, Onslow, Paul, Tilbury, John, Lay, Michael, Riches, Neil, Hunt, Roger, Neal, John, Pagan, Robin, Setchell, Norman

Publikováno v: Reform Magazine; Dec2012/Jan2013, p5-7, 3p