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Publikováno v:
SPIE Proceedings.
Optical Critical Dimension (OCD) measurements using Normal-Incidence Spectroscopic Polarized Reflectance and Ellipsometry allows for the separation of transverse electric and transverse magnetic modes of light reflected from an anisotropic sample as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6e328e632112839f0be2f7280cbcf04
https://doi.org/10.1117/12.557809
https://doi.org/10.1117/12.557809
