Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Paarhuis, Bart"'
To support the ever-increasing performance requirements of lithography systems in terms of throughput and accuracy, in this paper, we introduce a design framework for partial state-feedback reduced-order switching predictive models. By combining meas
Externí odkaz:
http://arxiv.org/abs/2402.13928
Autor:
Lio, Anna, Burkhardt, Martin, Smeets, Bart, Aben, Paul, Klinkhamer, Friso, van Damme, Jean Philippe, Paarhuis, Bart, Ganapathy Subramanian, Raaja, El Kodadi, Mohamed, Lichiardopol, Stefan, Pirati, Alberto, Vanoppen, Peter, de Boeij, Wim
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12494 Issue: 1 p124940R-124940R-13, 12369074p
Autor:
Smeets, Bart, Aben, Paul, Klinkhamer, Friso, van Damme, Jean Philippe, Paarhuis, Bart, Ganapathy Subramanian, Raaja, El Kodadi, Mohamed, Lichiardopol, Stefan, Pirati, Alberto, Vanoppen, Peter, de Boeij, Wim
Publikováno v:
Proceedings of SPIE; 4/7/2023, Vol. 12494, p124940R-124940R-13, 1p
Autor:
de Boeij, Wim, Dicker, Gerald, de Wit, Marten, Bornebroek, Frank, Zellenrath, Mark, Voorma, Harm-Jan, Smeets, Bart, Toussaint, Rene, Paarhuis, Bart, de Jong, Marteijn, Hellweg, Dirk, Kornitzer, Klaus
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71401B-71401B-11, 11p
Autor:
Erdmann, Andreas, Kye, Jongwook, Lee, Byeong Soo, Kim, Young Ha, Hwang, Hyunwoo, Lee, Jeongjin, Kong, Jeong Heung, Kang, Young Seog, Paarhuis, Bart, Kok, Haico, de Graaf, Roelof, Weichselbaum, Stefan, Droste, Richard, Mason, Christopher, Aarts, Igor, de Boeij, Wim P.
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9780 Issue: 1 p97800B-97800B-7, 880208p
Autor:
Bouchoms, Igor, Leenders, Martijn, Kuit, Jan Jaap, Kazinczi, Robert, de Graaf, Roelof, Paarhuis, Bart, Gunter, Pieter, Weichselbaum, Stefan, Beems, Marcel, Verhoeven, Martin, van Ballegoij, Rob
Publikováno v:
Proceedings of SPIE; March 2012, Vol. 8326 Issue: 1 p83260L-83260L-15, 8242756p
Autor:
Erdmann, Andreas, Kye, Jongwook, Kim, Young Ha, Jang, Jonghoon, Lee, Byeong Soo, Hwang, Hyunwoo, Nam, Youngsun, Kong, Jeong-Heung, Kang, Young Seog, Jang, Se-Yeon, Paarhuis, Bart, van der Wielen, Jeroen, Moest, Barry, Jongen, Joris, Weichselbaum, Stefan, Verbeek, Niek, Stavenga, Marco, de Graaf, Roelof, Droste, Richard
Publikováno v:
Proceedings of SPIE; March 2017, Vol. 10147 Issue: 1 p1014717-1014717-6