Zobrazeno 1 - 3
of 3
pro vyhledávání: '"P. W. Sandstrom"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 11:1199-1205
We have constructed a multidipole rf plasma system in a bell jar with a single planar rf powered electrode inserted at one end of a ‘‘magnetic bucket.’’ Capacitive probe measurements revealed that the rf fluctuations are particularly large in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::984929fbb6ab67e8c22e9c514111ee24
https://doi.org/10.1116/1.578493
https://doi.org/10.1116/1.578493
Autor:
S. J. Durst, G. Tellez, Bratislav Stanković, M. DeMars, J. R. Abba, B. M. Link, R. Meyers, Weijia Zhou, P. W. Sandstrom
Publikováno v:
SAE Technical Paper Series.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55d8e6ac017b43148835400f069e9ac7
https://doi.org/10.4271/2002-01-2280
https://doi.org/10.4271/2002-01-2280
Publikováno v:
AIP Conference Proceedings.
Plasma Source Ion Implantation* (PSII) is a non-line-of-sight technique for energetic ion surface modification of materials. At the University of Wisconsin there are presently three PSII systems two of which measure about 1 m3 and a third that measur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a3819bc2f9d0b40610f1129a81d7492
https://doi.org/10.1063/1.1395481
https://doi.org/10.1063/1.1395481