Zobrazeno 1 - 3
of 3
pro vyhledávání: '"P. L. Skrinskii"'
Autor:
O. Yu. Khizhun, A. I. Kuzmichev, O. O. Butenko, L. A. Ivashchenko, I. I. Timofeeva, Tamara Tomila, Volodymyr Ivashchenko, P. L. Skrinskii, Sergey Dub
Publikováno v:
Powder Metallurgy and Metal Ceramics. 52:73-82
Monolayer TiN and a-BCN and nanolayer TiN/BCN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias voltage on the mechanical properties of the deposited nanolayer coatings is stud
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a932c4c6e4031a4aac0b9c3e7e874065
https://doi.org/10.1007/s11106-013-9497-7
https://doi.org/10.1007/s11106-013-9497-7
Autor:
L. A. Ivashchenko, Volodymyr Ivashchenko, S. M. Dub, I. I. Timofeeva, P. L. Skrinskii, O. K. Porada
Publikováno v:
Powder Metallurgy and Metal Ceramics. 47:95-101
The paper examines nanocomposite coatings based on TiN and SiCN obtained by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS) as one of the precursors. The nanocomposite coatings demonstrate four types of structures
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::79b1d3d31882f36584a575b2d0d0faf1
https://doi.org/10.1007/s11106-008-0013-4
https://doi.org/10.1007/s11106-008-0013-4
Autor:
M. V. Ushakov, S. M. Dub, P. L. Skrinskii, A. I. Stegnii, O. K. Porada, Myroslav Karpets, L. A. Ivashchenko, Volodymyr Ivashchenko, L. A. Grishnova
Publikováno v:
Powder Metallurgy and Metal Ceramics. 46:543-549
Silicon carbon nitride (SiCN) coatings deposited on a silicon substrate are produced by plasma-enhanced chemical vapor deposition (PECVD) using methyltrichlorosilane (MTCS), nitrogen, and hydrogen as starting materials. The coatings are characterized
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::71f0f062e5390f144c281455cbed3bcb
https://doi.org/10.1007/s11106-007-0084-7
https://doi.org/10.1007/s11106-007-0084-7