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pro vyhledávání: '"P. D. Tovt"'
Publikováno v:
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 21, Iss 4, Pp 33-39 (2023)
A developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The
Externí odkaz:
https://doaj.org/article/2cea37e7c2274ea18c4ba64b2be50d88
