A 30-to-80MHz simultaneous dual-mode heterodyne oscillator targeting NEMS array gravimetric sensing applications with a 300zg mass resolution

Autor: Gourlat, Guillaume, Sansa, Marc, Villard, Patrick, Sicard, Gilles, Jourdan, Guillaume, Ouerghi, Issam, Billiot, Gérard, Hentz, Sebastien

Publikováno v: 2017 IEEE International Solid-State Circuits Conference-(ISSCC)
2017 IEEE International Solid-State Circuits Conference-(ISSCC), Feb 2017, San Francisco, United States. pp.266-267

International audience; The extreme sensitivity of nano electro mechanical system (NEMS) to atomic scale physical variations has led to the breakthrough development of NEMS-based mass spectrometry systems capable of measuring a single molecule [1]. P

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::f5a349f6667842da6bc56b6099e4bad8
https://hal-cea.archives-ouvertes.fr/cea-02194505

Piezoresistive transduction optimization of p-doped poly-Silicon NEMS.

Autor: Ouerghi, Issam, Ludurczak, Willy, Duraffourg, Laurent, Ladner, Carine, Oudrhiri, Anouar Idrissi-El, Gergaud, Patrice, Vinet, Maud, Ernst, Thomas

Publikováno v: 2015 45th European Solid State Device Research Conference (ESSDERC); 2015, p149-152, 4p

A nanowire gauge factor extraction method for material comparison and in-line monitoring.

Autor: Ouerghi, Issam, Philippe, Julien, Ladner, Carine, Scheiblin, Pascal, Duraffourg, Laurent, Hentz, Sebastien, Ernst, Thomas

Publikováno v: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 2015, p361-364, 4p

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CMOS and NEMS Hybrid Architectures

Autor: Ernst, Thomas, Ouerghi, Issam, Ludurczak, Willy, Arcamone, Julien, Duraffourg, Laurent, Ollier, Eric, Philippe, Julien, Hentz, Sébastien

Publikováno v: ECS Transactions; September 2015, Vol. 69 Issue: 10