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Autor:
Otto Musken, Ali Z. Khokhar, David J. Thomson, Rafidah Petra, Mehdi Banakar, Nicholas J. Dinsdale, Harold M. H. Chong, Antulio Tarazona, Vinita Mittal, Graham T. Reed
Publikováno v:
AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019.
A CMOS compatible three-dimensional (3D) integrated photonics circuit for multilayer silicon photonics is reported. Slopes with angles between 10o and 15° were created in the oxide layer using single step wet etching to connect the two Si waveguide
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2c4b4277db77afa7b68f73199d104fc0
https://doi.org/10.1117/12.2542213
https://doi.org/10.1117/12.2542213
