Electron-emission properties of silicon field-emitter arrays in gaseous ambient for charge-compensation device.

Autor: Takeuchi, Mitsuaki, Kojima, Toshihiko, Oowada, Atsushi, Gotoh, Yasuhito, Nagao, Masayoshi, Tsuji, Hiroshi, Ishikawa, Junzo, Sakai, Sigeki, Kimoto, Tsunenobu

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Mar/Apr2008, Vol. 26 Issue 2, p782-787, 6p, 2 Diagrams, 1 Chart, 8 Graphs