Zobrazeno 1 - 10
of 20
pro vyhledávání: '"Ook-Sang Yoo"'
Autor:
Hyuk-Min Kwon, Hi-Deok Lee, Ook-Sang Yoo, R. Jammy, Jungwoo Oh, Min-Ki Na, H.-H. Tseng, Won-Ho Choi, In-Shik Han, Byung-Suk Park, Prashant Majhi
Publikováno v:
Microelectronic Engineering. 88:3424-3427
Analyzed herein is the impact of Si interface passivation layer (IPL) on device performance and reliability of Ge-on-Si field-effect transistors with HfSiO/TaN gate stack. Silicon passivation technique reduced the interface trap density as well as th
Autor:
Hee-Hwan Ji, Hi-Deok Lee, Du-Eung Kim, Younghwan Son, Han-Soo Joo, Ook-Sang Yoo, Tae-Gyu Goo, In-Shik Han, Chang-Ki Baek, Won-Ho Choi
Publikováno v:
IEEE Transactions on Nanotechnology. 8:654-658
This paper presents the depth profile of oxide trap density, extracted from the dual gate processed thermally grown oxide in NO ambient and remote plasma nitrided oxides by using multifrequency and multitemperature charge pumping technique in conjunc
Autor:
Hyuk-Min Kwon, Ook-Sang Yoo, In-Shik Han, Chang Yong Kang, Raj Jammy, Byoung Hun Lee, Yoon-Ha Jeong, Rino Choi, Hi-Deok Lee, Seung Chul Song, Min-Ki Na, Tae-Gyu Goo, Won-Ho Choi, Ga-Won Lee
Publikováno v:
Microelectronic Engineering. 86:268-271
For the first time, we present a comparative study on HfLaSiON and HfLaON gate dielectric with an equivalent oxide thickness (EOT) of 0.8nm (T"i"n"v=1.2nm). A detailed DC analysis of I"o"n vs. I"o"f"f shows HfLaON performs somewhat better than HfLaSi
Autor:
Min Ki Na, Jin-Suk Wang, Byoung Hun Lee, Jungwoo Oh, Ook Sang Yoo, Prashant Majhi, Kyung Seok Min, Hyuk-Min Kwon, Kyong Taek Lee, H-H. Tseng, Hi-Deok Lee, Chang Yong Kang, Raj Jammy
Publikováno v:
Microelectronic Engineering. 86:259-262
The effects of a Si capping layer on the device characteristics and negative bias temperature instability (NBTI) reliability were investigated for Ge-on-Si pMOSFETs. A Ge pMOSFET with a Si cap shows a lower subthreshold slope (SS), higher transconduc
Autor:
Jungwoo Oh, Hsing-Huang Tseng, Jin Suk Wang, Chang Yong Kang, Min Ki Na, B. H. Lee, Hi Deok Lee, Hyuk-Min Kwon, Ook Sang Yoo, In Shik Han, Prashant Majhi, Raj Jammy, Won Ho Choi
Publikováno v:
Materials Science and Engineering: B. :102-105
We demonstrated the effect of post-metallization annealing and Si interlayer thickness on Ge MOS capacitor on Ge-on-Si substrate with HfO2/TaN. Ge outdiffusion and oxygen interdiffusion were completely suppressed by thick Si interfacial layer. As a r
Autor:
Dae-Byung Kim, Young-Seok Kang, Heui-Seung Lee, In-Shik Han, Min-Ki Na, Tae-Gyu Goo, Ook-Sang Yoo, Yong-Goo Kim, Hee-Hwan Ji, Hi-Deok Lee, Won-Ho Choi, Sung-Hyung Park
Publikováno v:
Japanese Journal of Applied Physics. 47:2628-2632
In this paper, we investigated the device performance and negative bias temperature instability (NBTI) degradation for thermally nitrided oxide (TNO) and plasma nitrided oxide (PNO) in nanoscale p-channel metal oxide semiconductor field effect transi
Autor:
Hi-Deok Lee, Myoung-Gyu Choi, Won-Ho Choi, Tae-Gyu Goo, Han-Soo Joo, Ga-Won Lee, In-Shik Han, Ook-Sang Yoo
Publikováno v:
Journal of the Korean Institute of Electrical and Electronic Material Engineers. 20:1-7
In this paper, two kinds of initial oxidation methods i.e., SLTO(Slow Low Temperature Oxidation: ) and RTO(Rapid Thermal Oxidation: ) are applied prior to the plasma nitridation for ultra thin oxide of RPNO (Remote Plasma Nitrided Oxide). It is obser
Autor:
Rino Choi, Byung Sun Ju, Ook Sang Yoo, R. Jammy, Yoon-Ha Jeong, Byoung Hun Lee, Kyong Taek Lee, Kyung Seok Min, Chang Yong Kang, Hi-Deok Lee, J.C. Lee
Publikováno v:
IEEE Electron Device Letters. 29:565-567
The effects of in situ O2 plasma treatment on device characteristics and reliability of metal-gate/high-k devices are investigated systematically. It was found that the O2 plasma treatment can be employed for mitigating the formation of a leakage pat
Autor:
J.C. Lee, B. H. Lee, Chang Yong Kang, Yoon-Ha Jeong, Ook Sang Yoo, Kyong Taek Lee, Rino Choi, Hi-Deok Lee
Publikováno v:
IEEE Electron Device Letters. 29:389-391
Due to the increased physical dielectric thickness and reduced gate leakage in metal-gate/high-k devices, degradation caused by channel hot carriers (HCs) becomes more significant than positive bias temperature stress. In an analysis of metal-gate/hi
Autor:
Hyuk-Min Kwon, Hi-Deok Lee, Sung Soo Park, Ook-Sang Yoo, Kwang-Il Choi, I. S. Han, Min-Ki Na, Han-Soo Joo, Seaung-Suk Lee, Won-Ho Choi, Dong-Ho Nam, Jae-Chul Om, Ga-Won Lee
Publikováno v:
Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials.